- 1、Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography
Zhaohui Tang, Jun Zhao, Xiao Deng, Wen Tan, Yanqing Wu, Renzhong Tai, Xinbin Cheng, Tongbao Li, Optik, 2023, 279(170735
- 2、Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication
Deng Xiao, Tan Wen, Tang Zhaohui, et al， Nanomanuf Metrol 5, 179–187（2022)
- 3、Critical dimension scanning electron microscope characterization of smoothly varying wave structures with MC simulation
Khan M S S , Yang L H, Deng X, et al, Journal of Physics D: Applied Physics, 2021, 54(44):44530
- 4、A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope
Xiao Deng, Gaoliang Dai, Jie Liu, et al, Ultramicroscopy, 2021,226
- 5、Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings
Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-
- 6、Self-traceable nano-grating frequency doubling based on polarization gradient light field
Wang Xinpan, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 7、Optimization of line edge roughness before and after etching with photoresist in soft x-ray interference lithography
Tang Zhaohui, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 8、Study on diffraction efficiency of Cr nanograting prepared by laser-focused atomic deposition
Liu Jie, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 9、A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography
Gu Zhenjie, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 10、The effects of thermocompression bonding on Si/ SiO2 multilayer thin-film based critical dimension structures
Cai Yanni, Deng Xiao, Wang Xinpan, et al. Proc Spie, 2020, 11617
