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Critical dimension scanning electron microscope characterization of smoothly varying wave structures with MC simulation
Muhammad Saadat Shakoor Khan, Yang Lihao, Deng Xiao, et al, Journal of Physics D: Applied Physics, 2021, 54(44):445301 (14pp).

发布时间：2021-08-13 发布者：来源：浏览：

Khan M S S , Yang L H, Deng X, et al, Journal of Physics D: Applied Physics, 2021, 54(44):445301

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