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Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography
Zhaohui Tang, Jun Zhao, Xiao Deng, Wen Tan, Yanqing Wu, Renzhong Tai, Xinbin Cheng, Tongbao Li, Optik, 2023, 279(170735)

发布时间：2023-04-03 发布者：来源：浏览：

Zhaohui Tang, Jun Zhao, Xiao Deng, Wen Tan, Yanqing Wu, Renzhong Tai, Xinbin Cheng, Tongbao Li, Optik, 2023, 279(170735)

Zhaohui Tang, Jun Zhao, Xiao Deng, Wen Tan, Yanqing Wu, Renzhong Tai, Xinbin Cheng, Tongbao Li, Optik, 2023, 279(170735)