科学研究

A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Gu Zhenjie, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617.

发布时间:2020-12-04 发布者: 来源: 浏览:

Gu Zhenjie, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617.