科学研究

The effects of thermocompression bonding on Si/ SiO2 multilayer thin-film based critical dimension structures

Cai Yanni, Deng Xiao, Wang Xinpan, et al. Proc Spie, 2020, 11617.

发布时间:2020-12-04 发布者: 来源: 浏览:

Cai Yanni, Deng Xiao, Wang Xinpan, et al. Proc Spie, 2020, 11617.