代表性论著-同济大学精密光学工程技术研究所

代表性论著论著列表

Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography

Zhaohui Tang, Jun Zhao, Xiao Deng, Wen Tan, Yanqing Wu, Renzhong Tai, Xinbin Cheng, Tongbao Li, Optik, 2023, 279(170735

DOI：10.1016/j.ijleo.2023.170735

Related Articles：https://authors.elsevier.com/c/1gjRn6wQfYrR6
Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication

Deng Xiao, Tan Wen, Tang Zhaohui, et al， Nanomanuf Metrol 5, 179–187（2022)

DOI：10.1007/s41871-022-00140-y

Related Articles：https://doi.org/10.1007/s41871-022-00140-y
Critical dimension scanning electron microscope characterization of smoothly varying wave structures with MC simulation

Khan M S S , Yang L H, Deng X, et al, Journal of Physics D: Applied Physics, 2021, 54(44):44530

DOI：10.1088/1361-6463/ac0de5

Related Articles：https://iopscience.iop.org/article/10.1088/1361-6463/ac0de5
A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope

Xiao Deng, Gaoliang Dai, Jie Liu, et al, Ultramicroscopy, 2021,226

DOI： 10.1016/j.ultramic.2021.113293

Related Articles：https://doi.org/10.1016/j.ultramic.2021.113293
Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings

Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-

DOI：10.1088/1361-6528/abdcec

Related Articles：https://iopscience.iop.org/article/10.1088/1361-6528/abdcec
Self-traceable nano-grating frequency doubling based on polarization gradient light field

Wang Xinpan, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617

DOI：10.1117/12.2585373

Related Articles：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11617/2585373/Self-traceable-nano-grating-frequency-doubling-based-on-polarization-gradient/10.1117/12.2585373.full

共6条首页上页1下页尾页到第页跳转

科学研究

友情链接

联系方式