Being a precision measurement technology on the nanometric scale, nanometrology is a fundamental technology adopted by advanced nano-fabrication. The development of nanometrological standard substances is vital, not only to guarantee the dissemination of traceability, an elementary topic in nanometrology, but also to ensure the unity and accuracy of nano-geometric measurements. Thus far, nanotechnology is evolving towards the direction of reducing characteristic dimensions, which has forced the advanced manufacturing industry to urgently find nano-length standard substances with high accuracy and stability, including the linewidth, step height, linear scale, pitch (one-dimensional grating, 1D), and grid (two-dimensional grating, 2D).