Research

Xiao DengMore

  • Title:Professor
  • Tel:18135@tongji.edu.cn
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work experienceDecember 2021 – present, Associate Professor, School of Physical Science and Engineering, Tongji UniversityDecember 2018-December 2021, Assistant Professor, School of Physical Science and Engineering, Tongji UniversityEducational experienceFrom December 2016 to December 2018, he was a postdoctoral fellow at the School of Aerospace and Mechanics of Tongji UniversityFrom August 2...

  • Personal Experience
  • Research Areas
  • Research Project
  • Academic Achievements
  • Honors and Awards

work experience

December 2021 – present, Associate Professor, School of Physical Science and Engineering, Tongji University

December 2018-December 2021, Assistant Professor, School of Physical Science and Engineering, Tongji University


Educational experience

From December 2016 to December 2018, he was a postdoctoral fellow at the School of Aerospace and Mechanics of Tongji University

From August 2014 to July 2016, the National Institute of Standards and Technology (NIST) joint doctoral training

September 2011-December 2016 PhD in Optics, Department of Physics, Tongji University

September 2007-June 2011 Bachelor of Applied Physics, Department of Physics, Tongji University


Mainly engaged in the research of grating reference material and nanometrics.



Start time

End time

Project name

Project source

contribution

2022.1

2023.12

Transformative optical metrology sensing technology innovation and demonstration application

Shanghai Zhangjiang National Independent Innovation Demonstration Zone Special Development Fund Major Project

Subject 2 person in charge

2021.1

2024.12

Research on calibration technology of laser interferometer based on self-traceable grating interferometer

Fund Commissioned General Project

Project manager

2019.12

2021.11

Research on key technologies of grating standard for calibration of nanoscale wafer lithography and development of metrology standard

National key research and development plan project

Project manager



paper:

[1]Xiao D, Gd B , Jie L A , et al. A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope[J]. , 2021, 226.

[2] Liu J , Zhao J , Deng X, et al. Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings[J]. Nanotechnology, 2021, 32(17):1753 01 -.

[3] Khan M S S , Yang L H ,Deng X, et al. Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation[J]. Journal of Physics D: Applied Physics, 2021, 54(44) :445301 (14pp).

[4] Jie Chen, Jie Liu, Li Zhu,Xiao Deng, Xinbin Cheng, Tongbao Li. Optimization of laser focused atomic deposition by channeling[J]. Chinese Physics B, 2020, v.29(02):207-212.

[5]Xiao Deng, Jie Liu, et al. Realization of orthogonality in two-step laser focused Cr atomic deposition - ScienceDirect[J]. Optik, 2019, 185:423-428.

[6]Deng X, Liu J, Zhu L, et al. Natural square ruler at nanoscale[J]. Applied Physics Express, 2018, 11(7):075201.

[7] Chen Jie, Liu Jie, Wang Xingrui, Zhang Longfei, Deng Xiao, et al. Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis[J]. Measurement Science Review, 2017, 17(6).

[8] Zhu Li, Deng Xiao, Liu Jie, Cheng Xinbin, Li Tongbao. Deposition of Cr Atoms Using Switching-Detuning Light Mask for Direct Atom Lithography[J]. Current Nanoscience, 2018, 14(6).

[9] Z Wu, Y Cai, X Wang, L Zhang, X Deng, X Cheng, T Li. Amorphous Si critical dimension structures with direct Si lattice calibration[J]. Chinese Physics B, 2019, 28(3):030601 (5pp).

[10] L Zhang, X Wang, X Cheng, X Deng. Process optimization of selective wet etching for fabrication of high-aspect-ratio and uniform multilayer grating reference materials[J]. Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2018, 17(4).

[11] Chen Jie, Liu Jie, Zhu Li, Deng Xiao, Cheng Xinbin, Li Tongbao. Research on optimization of atomic flux in atomic lithography [J]. Acta Optics Sinica, 2018, 38(12):5.

[12] Xiqiao Wang, Pradeep Namboodiri, Kai Li, Xiao Deng, and Richard Silver. Spatially resolved scanning tunneling spectroscopy of single-layer steps on Si(100) surfaces[J]. Physical review, 2016, 94(12):125306.1 -125306.12.

[13]Xiao D, Namboodiri P, Kai L, et al. Silicon epitaxy on H-terminated Si (100) surfaces at 250 °C[J]. Applied Surface Science, 2016, 378.

[14]Xiao D, Li T B, Lei L H, et al. Fabrication and measurement of traceable pitch standard with a big area at trans-scale[J]. Chinese Physics B,2014,23(09):147-151.

[15]Deng X, Ma Y, Zhang P, et al. Investigation of shadow effect in laser-focused atomic deposition[J]. APPLIED SURFACE SCIENCE, 2012, 261:464-469.

patent:

[1] A preparation method of self-traceable grating reference material that accurately shortens the pitch value 202010575620.3  second inventor

[2] A method for preparing a two-dimensional atomic lithographic grid structure 201810548515.3  second inventor

[3] A device for realizing step-by-step deposition two-dimensional atomic lithography ZL201810548512.X   second inventor


1. In 2022, two-dimensional chromium nanogrid standard material (GBW(E)130838), national secondary standard material

2. In 2021, one-dimensional chromium nano-grating standard material (GBW13982), national first-class standard material

3. In 2021, one-dimensional silicon nanograting standard material (GBW13983), a national first-class standard material

4. In 2021, multi-structure silicon nanowire width standard material (GBW(E)130744), national secondary standard material

5. In 2021, he will be selected into the Young Talents Promotion Project of China Association for Science and Technology