Bruker Atomic Force Microscope
Model: Dimension Edge
Introduction: The device can use the active force between the probe and the atoms of the sample under test to detect the surface structure of solid materials, and the group mainly uses it for surface morphology detection of gratings. Its scanning range in X-Y direction is 90μm×90μm, and the closed-loop noise level is less than 0.5nm RMS value; the scanning range in Z direction is 10μm, and the noise level is less than 50pm RMS value, and the observable range of sample stage (X-Y axis) is 150mm×150mm.
