Pico-meter displacement interferometry-INSTITUTE OF PRECCISION OPTICAL ENGINEERING TONGJI UNIVERSITY

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Home / Research / Research Areas / Optical Nanometrology and Measurement / Research Infrastructure / Content

Pico-meter displacement interferometry

Laser Interferometer

Model: QuDIS

Introduction: The main function is to perform relative and absolute distance measurement, which can be used for vibration analysis, drift measurement, position angle measurement, velocity and acceleration measurement, etc. The laser wavelength used in the system is 1535nm, the resolution is up to 1pm, the signal stability is less than 0.05nm, the working distance is 20-1400mm, the maximum measurement speed is 1m/s, with 3 sensing channels.

Copyright: Institute of precision optical engineering technology, Tongji University

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