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Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings
Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-.

发布时间：2021-02-05 发布者：来源：浏览：

Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-.

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