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A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope

发布时间：2021-05-03 发布者：来源：浏览：

Xiao Deng, Gaoliang Dai, Jie Liu, et al, Ultramicroscopy, 2021,226.

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