科学研究

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Chen Jie, Liu Jie, Wang Xingrui, et al. Meas Sci Rev, 2017, 17(6): 264-268.

发布时间:2017-11-22 发布者: 来源: 浏览:

Chen Jie, Liu Jie, Wang Xingrui, et al. Meas Sci Rev, 2017, 17(6): 264-268.