科学研究

Characteristics of Local Anodic Oxidation of Silicon Surfaces by AFM and Fabrication of Nanoscale Metrology Standard Sample

Cheng Feng,Ma Yan,Ma Rui,Li Tongbao. Nanotechnology and Precision Engineering,2016,14(2):150-157.

发布时间:2016-03-31 发布者: 来源: 浏览:

Cheng Feng,Ma Yan,Ma Rui,Li Tongbao. Nanotechnology and Precision Engineering,2016,14(2):150-157.