Evolution of chemical, structural, and mechanical properties of titanium nitride thin films deposited under different nitrogen partial pressure
Runze Qi, Liuyang Pan, Yufei Feng, Jiali Wu, Wenbin Li, Zhanshan Wang, Results in Physics, 19, 103416 (2020).

发布时间：2020-12-19 发布者：来源：浏览：

Runze Qi, Liuyang Pan, Yufei Feng, Jiali Wu, Wenbin Li, Zhanshan Wang, Results in Physics, 19, 103416 (2020).