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Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings
Time:2021-02-05
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Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-.
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A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope
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Self-traceable nano-grating frequency doubling based on polarization gradient light field
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