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Home / Research / Research Areas / Optical Nanometrology and Measurement / Publications / Publication List / Content

A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope

Time：2021-05-03 Publisher： Source： Visit:

Xiao Deng, Gaoliang Dai, Jie Liu, et al, Ultramicroscopy, 2021,226.

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