Equipment Name: Dual Ion Beam Sputtering Coating Machine
Model: Veeco
Equipment Description: This machine utilizes an ion source to emit ions, which are then extracted, accelerated, and focused into a beam. This ion beam is directed at a target placed in a high vacuum environment, allowing for the deposition of sputtered atoms. Ion Beam Sputtering (IBS) coating on optical components helps achieve the highest possible performance for demanding laser optical applications. The thin films on these optical components possess dense, pore-free, and uniform coating layers, resulting in performance characteristics that are drift-free and insensitive to temperature fluctuations. Post-coating, these optical components exhibit minimal surface defects, thus minimizing absorption and scattering that may occur when handling light.
Technical Specifications: The system can produce laser optics components with the following characteristics:
- Reflectance greater than 99.99% and high laser damage threshold for laser reflection mirrors
- Low loss for laser lenses and laser window pieces
- Capability to withstand high laser energy with rapid transition capability for laser filters.
