Equipment Name: Infrared Multifunction Coating Machine
Model: Leybold ARES1100
Main Functions: This machine is capable of electron beam evaporation or ion-assisted preparation of various dielectric optical films spanning from near-infrared to far-infrared wavelengths. It can also deposit various metallic films and can process substrates with diameters up to 350mm.
Technical Specifications: The system features a two-stage vacuum pump unit, including Polycold and a cryopump. It is equipped with a single electron gun with dual impedance evaporation configuration and a high-precision optical thickness monitoring system OM S5000. The crystal oscillator thickness monitoring system XTC/3 utilizes six-point quartz sensors, and the APS ion source software enables fully automatic control of the deposition process.
Applications:
(1) Gas detectors for CO2, CH4, and infrared imaging, including AR (Anti-Reflective) coatings, HR (High Reflectance) coatings, BPF (Bandpass Filters), Edge filters, PBS (Polarizing Beam Splitter), and more.
(2) Various consumer products such as infrared detector windows, infrared thermometry, and infrared sensors, including AR coatings, HR coatings, and BPF coatings.
(3) Applications involving visible light inspection, CCD imaging, laser ranging, and infrared search and tracking, including AR coatings, HR coatings, PBS, BPF, Edge filters, and more.
