Internal database Contact us 中文
Internal database Contact us 中文

Research

Home / Research / Research Platform / Hardware Equipment / Film Coating Equipment / Content
Research

Magnetron sputtering coating machine 1#

Time：2022-07-01 Publisher： Source： Visit:

Introduction: Magnetron sputtering is used to prepare various optical thin films in the extreme ultraviolet to X-ray bands, such as W/Si multilayer films, Cr/C multilayer films, Pt monolayer films, etc. Sample size: Φ 100mm; Thickness uniformity accuracy: better than 2%. Suitable for the preparation of various small-sized mirrors, polarizers, and monochromator films in extreme ultraviolet, X-ray, and neutron optical systems.

BACK

©2022 Institute of Precision Optical Engineering TechnologyBeijingicp bei 05051632-16

Copyright: Institute of precision optical engineering technology, Tongji University

Links

Contact information

Tel: +86-21-65984652

Address: 1239 Siping Road, Shanghai, P.R. China

E-mail: 1986jiangli@tongji.edu.cn