Research

Ultra high vacuum magnetron sputtering coating machine 2#

Time:2022-07-01 Publisher: Source: Visit:

Introduction: Magnetron sputtering is used to prepare various optical thin films in the extreme ultraviolet to X-ray bands, such as W/Si multilayer films, Cr/C multilayer films, Pt monolayer films, etc. And it can achieve online vacuum annealing and other technological means. Sample size: Φ 100mm; Thickness uniformity accuracy: better than 2%. Suitable for the preparation of various small-sized mirrors, polarizers, monochromators, and other thin films in extreme ultraviolet, X-ray, and neutron optical systems.