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Ultra high vacuum magnetron sputtering coating machine 2#

Time：2022-07-01 Publisher： Source： Visit:

Introduction: Magnetron sputtering is used to prepare various optical thin films in the extreme ultraviolet to X-ray bands, such as W/Si multilayer films, Cr/C multilayer films, Pt monolayer films, etc. And it can achieve online vacuum annealing and other technological means. Sample size: Φ 100mm; Thickness uniformity accuracy: better than 2%. Suitable for the preparation of various small-sized mirrors, polarizers, monochromators, and other thin films in extreme ultraviolet, X-ray, and neutron optical systems.

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