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Micro-nano Optical Devices and Integrated Applications

This division is devoted to the study of the regulation mechanism, device design, characteristic fabrication, and integrated applications of wafer-level micro-nano optical devices. The research direction focuses on theories of optical field modulation, computational electromagnetism, micro-nano machining technology, and on-chip integration applications.

Publications

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Diatomic Metasurface for Efficient Six-Channel Modulation of Jones Matrix

​Chao Feng, Tao He, Yuzhi Shi, Qinghua Song, Jingyuan Zhu, Jian Zhang, Zhanshan Wang, Din Ping Tsai, Xinbin Cheng，Laser & Photonics Reviews，2023, 2200955.

Team

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Ruisheng Yang

He is selected for the 2023 Shanghai "Super Postdoctoral Fellowship" incentive program, and engaged in the research of metasurfaces, metagratings and micro-nano optical devices. He has published more than 30 SCI papers in Laser & Photonics Research, PNAS, Advanced Materials, InfoMat and other journals, with more than 800 citations.

Xinbin Cheng

Xinbin Cheng, doctoral supervisor and professor at the School of Physical Science and Engineering, Tongji University, is also the director of the Institute of Precision Optical Engineering Technology. He was supported by The National Science Foundation for Distinguished Young Scholars and has awarded the National Technology Invention Award (Second Class) as well as the Chinese Patent Gold Award, also achieved the commercialization of laser thin film technology. Mainly engaged in the research of micro-nano intelligent sensing, high-power laser devices and nanometrology. He has undertaken more than ten scientific research projects such as national major science and technology projects, national key research and development programs, and the National Natural Science Foundation of China, and published more than 40 articles as the first or corresponding author in journals such as Science Advances, Light: Science & Applications, Optica, Optics Letters.

Siyu Dong

He has been selected in the “Super Doctoral Postdoctoral ” Incentive Program by the city of Shanghai. His primary research focuses on micro- and nano-structured optical devices and their applications in spectroscopic sensing. He has undertaken various research projects including special funding supported by China Postdoctoral Science Foundation and National Natural Science Foundation of China. His research findings have been published in renowned journals such as "Light: Science & Applications," "Progress in Surface Science," "Applied Physics Letters," and "Optics Express."

Tao He

He is mainly engaged in the research of Nanophotoncis. He has published several papers in Sci. Adv.、Laser Photonics Rev.、Opt. Lett., and granted 2 patents.

Kai Ou

Prof. Kai Ou’s interests mainly focus on developing the theory of multi-dimensional manipulation of vectorial light field based on micro-nano structures, and experimental characterization of photonic and meta-optical devices. He and his collaborators propose new concepts of multi-dimension regulation of mid-infrared meta-optics. His research has published in Science Advances, Light: Science & Applications, Materials Today, Laser & Photonics Reviews, Nanoscale, etc. Dr. Ou has won the President's Excellence Award of Chinese Academy of Sciences in 2021. He is a reviewer of optics authoritative journals such as Optics and Laser Technology, Optics Letters, Optics Express, etc.

Yuzhi Shi

Yuzhi Shi, a doctoral supervisor at the School of Physics Science and Engineering, has been selected for the National High-level Youth Talents Program,the National General Program, and the Shanghai Leading Talents (Overseas) Youth Program. His research mainly focuses on the fundamental theory and biological applications of optofluidic chips. He leads the National Key R&D Program of China, the National Natural Science Foundation of China (NSFC) Youth Project and General Program, the Shanghai General Program and Pilot Program for Basic Research, and other projects. As the first/corresponding author, he has published over seventy papers in renowned journals, including Science Advances (×5), Physical Review Letters (×4), Light: Science & Applications (×7), Nature Communications (×5), and Advances in Optics and Photonics (×2).

Zeyong Wei

He is mainly engaged in the research of light field regulation mechanism of artificial microstructure materials, computational electromagnetism and light field simulation software. The theory of dimensionality reduction is developed, which improves the efficiency of periodic optical field simulation by 1-2 orders of magnitude. The bottleneck of full wave simulation for mixed-scale optical systems with micro and nano devices is broken. A wideband electromagnetic transparency method based on interlayer coupling is proposed, and model application research is carried out. He has published more than 60 SCI papers in Advanced Optical Materials, Applied Physics Letters, Optics Letters and other journals, applied for more than 20 national invention patents, and cited more than 2400 times. He applied for and obtained three National Natural Science Foundation projects, and undertook a number of national defense scientific research projects as the project leader.

Lingyun Xie

Xie Lingyun is a postdoctoral researcher at the School of Electronic and Information Engineering, Tongji University. Her primary research focuses on micro-nano devices, with a special emphasis on laser thin films, multilayer dielectric gratings, and strong laser field control. She has published 8 articles as the first author or co-first author/corresponding author in internationally and domestically renowned journals, including Optica, Optics Express, Optics Letters, Micromachines, Applied Optics, and High Power Laser and Particle Beams. Additionally, She has been granted one national invention patent. She has received support from the National Natural Science Foundation of China (NSFC) Young Scientists Fund and has also been awarded the "Super Postdoctoral Fellowship" sponsored by Shanghai in 2021.

Huiqi Zhang

Zhang Huiqi is a research assistant at the School of Physics Science and Engineering, Tongji University, mainly engaged in research projects related to micro-nano optics and intelligent sensing.

Jingyuan Zhu

Graduated from the School of Information Science and Engineering of Fudan University, he is mainly engaged in the research of micro-nano processing technology with electron beam lithography as the core, its micro-nano optical devices and X-ray diffraction elements. He has participated in the National Natural Science Foundation of China Joint Cultivation Project, Major Project, 173 and other scientific research projects, and published many SCI articles in Microelectronic Engineering, ECS Journal of Solid-State Science and Technology, Chinese Physics B and other journals.
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Haoran Li

2018 PhD Candidate

Scattering characteristics and experimental research

Jianyu Zhou

2018 PhD Candidate

On chip filtering microstructure

Haigang Liang

2019 PhD Candidate

inverse design of high-efficient metasurface

Zhanyi Zhang

2019 PhD Candidate

Design and Fabrication of optical metasurfaces

Xue Dongbai

2020 PhD Candidate

Laser interference lithography system and holographic grating preparation technology research

Chengfeng Li

2020 PhD Candidate

Design, fabrication and application of optical metasurface

Xiaojia Liang

2020 PhD Candidate

Metasurface

Shuqiao Li

2021 PhD Candidate

On-chip Devices

Weijie Xv

2021 PhD Candidate

Deep learning-based nanophotonics inverse design and electromagnetic field simulation

Chao Feng

2021 PhD Candidate

Design and fabrication of high efficiency metasurface

Yijie Luo

2021 PhD Candidate

Broadband anomalous reflections of microwave frequencies metasurfaces

Yi Ning

2021 PhD Candidate

Metasurface design and fabrication

Xvhao Luo

2021 PhD Candidate

Design, fabrication and application of optical metasurface

Haoyu Li

2022 PhD Candidate

On-chip optical computing, design of optical metasurface, numerical simulation calculations

Linyuan Dou

2022 PhD Candidate

On-chip metasurface design and numerical simulation

Xiaofeng Rao

2022 PhD Candidate

Design and fabrication of metasurface

Zhiyuan Ma

2022 PhD Candidate

Nonlinear optics in micro-nano structures and devices

Hong Luo

PhD candidate

Optical tweezers

Chengfeng Lu

2022 PhD candidate

Optofluidic tweezers and optical forces

Liang Liu

2022 PhD Candidate

Supersurface design and preparation

Research Infrastructure

This division is equipped with a 1000-core CPU and 15 TB memory for simulation, as well as the self-controllable high-efficiency basic industrial software for optical field simulations, which can satisfy a rapid simulation and the design of micro-nano optical devices and macro-micro integrated optical systems. The division possesses a 6-inch spin coater, an 8-inch high-resolution electron beam lithographic system, a low-temperature reactive ion etching system, an atomic layer deposition machine, and other essential fabrication equipment for micro-nano optical devices. Furthermore, various testing platforms are also available, including a scanning electron microscope, an atomic force microscope, and an angular resolution testing system. In summary, the division has demonstrated competitive strengths in the manufacturing and characterization of micro-nano structures.


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E-mail: 1986jiangli@tongji.edu.cn