Introduction:
This machine prepares various types of large-sized flat mirrors that reflect extreme ultraviolet to X-ray bands. It also produces optical reflector films for the inner and outer surfaces of cylindrical mirrors. This includes W/Si multilayer film, Cr/C multilayer film, and Pt single-layer film. The machine can handle samples up to 400x1200mm in size, ensuring 1% thickness uniformity accuracy on column surfaces. Suitable for making different kinds of big mirrors, filters, and color-separating devices and other thin coatings in systems that use very high-energy light, X-rays and neutrons as optics.
