Ellipsometer

Model: SE-VE-L

Brand: Wuhan Yiguang Technology Co., Ltd

Introduction: Based on the single-rotation compensator modulation technology, the equipment obtains the spectra of Psi/Delta, N/C/S at one time, which can realize the rapid analysis and characterization of film thickness and optical constant of monolayer to multilayer films on the substrate. Spectral range: 400-800nm, incidence angle: 65°, spot size: 2-3mm, repeatability measurement accuracy: 0.05nm (100nm silicon-based SiO2 sample, 30 repeated measurements), film thickness measurement range: 0.1nm-10μm, single point measurement time: ≤10s, light source: high-performance imported halogen light source (halogen lamp life: 2,000h), visualization sample microalignment system. It has the ability to analyze single-layer, multi-layer film thickness and optical constant (refractive index, extinction coefficient); Support common optical constant models as well as common oscillator models (Cauchy model, Lorentz model, Gaussian model, etc.; It also supports graphical multi-oscillator hybrid model fitting function; Support multi-component film and volume material optical constant and component ratio analysis functions; The core algorithm includes a strictly coupled wave model and an equivalent dielectric model.