Scanning electron microscope

Model: Sigma 300

Brand: Carl Zeiss

Introduction: Scanning electron microscopy is the most important means to observe the geometry and morphology of micro-nano structures and characterize the size of structures. It uses a narrow, focused beam of high-energy electrons to scan the sample, and through the interaction between the beam and the substance, the imaging result is obtained. It is available in both Inlens mode and SE2 mode, and is equipped with a 5-axis fully automated sample stage. Maximum imaging resolution≤ 5nm; Magnification from 10x to 1,000,000x, maximum accelerating voltage 30kV, probe current ranges from 3pA to 20nA, and sample chamber size of 365mm enable wafer-level inspection.