Internal database Contact us 中文
Internal database Contact us 中文

Research

Home / Research / Research Areas / X-ray Devices and Systems / Research Infrastructure / Content
Research

High Precision Dual Ion Beam Coating and Shape Correction Equipment

Introduction：High density nano-films with large size and mirror shape correction up to 500x300mm, for high reflectivity monolayer and multilayer film plating and mirror processing.

©2022 Institute of Precision Optical Engineering TechnologyBeijingicp bei 05051632-16

Copyright: Institute of precision optical engineering technology, Tongji University

Links

Contact information

Tel: +86-21-65984652

Address: 1239 Siping Road, Shanghai, P.R. China

E-mail: 1986jiangli@tongji.edu.cn