Research

Runze QiMore

  • Title:Assistant professor
  • Tel:qrz@tongji.edu.cn
  • Office:Curtain brothel of Shanghai West Campus
  • Information of Tutors:Master

Qi Runze is an assistant professor and master tutor at the School of Physical Science and Engineering, Tongji University. Mainly engaged in extreme ultraviolet and X-ray, neutron optical thin film element technology and related research, published 7 SCI papers, 2 EI papers (first/corresponding author), applied for/authorized 8 invention patents. The research results have been applied to: Germany BESSY II light source, Shanghai Synchrotron radiation light source, Dongguan spallation neutron source, China Institute of Engineering Physics, Shanghai Institute of Technical Physics and other scientific research institutions, but also for social related units to provide technical support. Relying on extreme ultraviolet film element technology, he participated in the development project of SY01 star-STURI space payload of Chinese Academy of Sciences as deputy chief engineer.

  • Personal Experience
  • Research Areas
  • Research Areas
  • Research Areas
  • Academic Achievements
  • Honors and Awards

Work experience:


From November 2019 to present, Assistant Professor, School of Physical Science and Engineering, Tongji University


From June 2018 to October 2019, Postdoctoral Fellow, School of Physical Science and Engineering, Tongji University


Educational experience:


From September 2012 to September 2017, Ph.D., School of Physical Science and Engineering, Tongji University


September 2006 - June 2010 Bachelor of Physics, School of Physics, Jilin University


He is mainly engaged in extreme ultraviolet and X-ray film element technology and related research.

None

Start time

End time

Project name

Project source

Major contribution

2021.1

2023.12

Fabrication and properties of Yb/Al multilayer films for solar observation at 54-90nm extreme ultraviolet band

National Natural Science Foundation Committee youth Science Fund project

Project leader

2020.1

2021.12

Study on irradiation stability of 46.5nm SC-based narrow-band multilayer reflector for solar observation imaging

Open project of Key Laboratory of Solar Activity, Chinese Academy of Sciences

Project leader

2021.1

2022.12

The 46.5nm extreme ultraviolet solar imager was prepared with a narrow-band multilayer mirror

Strategic Pilot Science and Technology Project of Chinese Academy of Sciences

Project leader

Articles:

1.Runze Qi, Qiushi Huang, Yang Yang, Zhong Zhang. Zhanshan Wang*. Stress and Microstructure Study of W/Si X-ray Multilayers with Different Structural Parameters,Journal of Nanoscience and Nanotechnology, 2019, 19(1): 568-574(7).

2.Liuyang Pan,Runze Qi*, Yufei Feng, Jiaqi Chen, Zhong Zhang, Wenbin Li, Zhanshan Wang*. Effect of nitrogen doping on surface morphology, microstructure, chemical composition and intrinsic stress of nickel thin films deposited by reactive sputtering. Surface and Coatings Technology, 2019, 364: 196-203.

3.Runze Qi, QiushiHuang*, Jiani Fei, Igor V. Kozhevnikov, Yang Liu, Pin Li, Zhong Zhang, Zhanshan Wang*.Evolution of the internal structure of short-period Cr/V multilayers with different vanadium layers thicknesses. Materials ,2019, 12(18): 2936.

4.Runze Qi,Liuyang Pan, Yufei Feng, Jiali Wu, Wenbin Li, Zhanshan Wang*. Evolution of chemical, structural, and mechanical properties of titanium nitride thin films deposited under different nitrogen partial pressure. Results in Physics, 2020,19:103416.

5.Yang Yang,Runze Qi*,Zhong Zhang, Yiyun Yao, Hangjian Ni,Zhanshan Wang, Huarui Wu, Xuewu Wang, Zhong Z A , et al. Ni-Ti supermirror coated onto a curved substrate for nested neutron-focusing optics. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2021, 986:164752

6.Yufei Feng,Runze Qi*, Li Jiang, Qiushi Huang, Tongzhou Li, Genchang Liu, Wenbin Li, Wensheng Yan, Zhong Zhang and Zhanshan Wang. Chemical Modification of B4C Films and B4C/Pd Layers Stored in Different Environments. Materials, 2021, 14:1319

7.Handan Huang, Li Jiang, Yiyun Yao, Zhong Zhang, Zhanshan Wang andRunze Qi*.Controlling Film Thickness Distribution by Magnetron Sputtering with Rotation and Revolution. Coatings,2021, 11(5):599

8.Runze Qi, Qiushi Huang, Yang Yang, Zhang Zhong, Zhanshan Wang*. Effects of sputtering parameters and separator plates on the structure and stress of w/si multilayers in x-ray telescope applications. Optical Engineering, 2017, 56(3), 035103.1-035103.6.

9.Changqing Wang, Zhanshan Wang, Zhong Zhang,Runze Qi*.Calculation and verification of linear target deposition distribution. Proc. SPIE, 2020, 11617:116171M

10.Jiali Wu,Runze Qi*, Zhanshan Wang, Qiushi Huang, Xianyong Bai,Structure and stability of Sc/Si multilayers with different thickness ratio for wavelength at 46.5 nm. Proc. SPIE, 2020, 11491:1149106


Patents:

授权时间

代表性授权专利名称及专利号

排名

2019.6

一种用于涂硼中子探测器富硼涂层的薄膜结构,CN201910180279.9

第一

2022.1

基于线型磁控溅射靶枪的大尺寸平面基底镀膜方法及装置,CN202010913247.8

第二

2021.2

一种直线型多功能磁控溅射镀膜设备及镀膜方法,CN202011079375.3

第二

2019.3

一种双功能柱对称大尺寸高均匀性线型磁控靶镀膜设备,ZL 201710247265.5

第三

2019.3

一种提高线型磁控溅射靶枪在凹形柱面基底镀膜质量的方法,ZL 201710247339.5

第三

2020.11

一种提高线型磁控溅射靶枪在凹形柱面基底镀膜质量的方法,ZL 201710247339.5

第三

2021.1

一种超高精度多层膜厚度漂移误差标定方法,CN202010945043.2

第三

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