Equipment Name: Atomic Force Microscope

Model: Dimension Icon

Main Function: Capable of characterizing the nanoscale surface morphology of samples and obtaining relevant surface information, including surface roughness.

Technical Specifications:

- Supports surface morphology detection for various materials.

- Capable of characterizing ultra-smooth substrates and ultra-low roughness optical thin film surfaces.

- Can resolve sub-angstrom-level vertical information.

- Maximum scanning range: 100 μm x 100 μm.

Applications:

(1) Suitable for various conductor, semiconductor, and insulator materials.

(2) Can be used to test the surface morphology of flat samples or samples with small curvature.

(3) Enables the analysis of relevant surface information such as roughness and power spectral density (PSD).