Scientific discoveries and innovations rely on the constantly emerging techniques of observation and instrumentation. The advantages of extreme ultraviolet, X-ray, and neuron include shorter wavelengths and higher photon or particle energy, attributing them with a higher resolution, “core” level detection of electron state, and larger penetration depth when applied as a technique of observation. Therefore, they have been widely used in microscopy and telescope applications, as well as for the fabrication of ultra-high precisions under extreme conditions. After more than two decades of exploration, the research group has established a complete scientific and technological platform for the researches and development of extreme ultraviolet, X-ray, and neuron thin film devices as well as precision optics systems, turning new observation and regulation approaches from visions into realities, which have been applied in various large scientific facilities and instruments both nationwide and globally.
