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Home / Research / Research Areas / Optical Nanometrology and Measurement / Publications / Publication List

Selected Publications Publication List

11、Optimization of laser focused atomic deposition by channeling
Chen Jie, Liu Jie, Zhu Li, et al. Chinese Phys B, 2020, 29(2)
12、Amorphous Si critical dimension structures with direct Si lattice calibration
Wu Ziruo, Cai Yanni, Wang Xingrui, et al. Chinese Phys B, 2019, 28(3)
13、Realization of orthogonality in two-step laser focused Cr atomic deposition
Deng Xiao, Liu Jie, Zhu Li, et al. Optik, 2019, 185: 423-8
14、Optimization of Atom Flux in Atom Lithography
Chen Jie,Liu Jie,Zhu Li,et al. ACTA OPTICA SINICA,2018,38(12):28-32
15、Process optimization of selective wet etching for fabrication of high aspect-ratio and uniform multilayer grating reference materials
Zhang Longfei, Wang Xingrui, Cheng Xinbin, et al. J Micro-Nanolith Mem, 2018, 17(4)
16、Deposition of Cr Atoms Using Switching-Detuning Light Mask for Direct Atom Lithography
Zhu Li, Deng Xiao, Liu Jie, et al. Curr Nanosci, 2019, 15(6): 626-30
17、Simulation of surface reconstruction of the one-dimensional rectangle grating AFM images by blind reconstructed tip
Hu Mingxia,Ma Yan. OPTICAL INSTRUMENTS,2018,40(03):52-59
18、Natural square ruler at nanoscale
Deng Xiao, Liu Jie, Zhu Li, et al. Appl Phys Express,2018;11(7)
19、Effect of Surface and Sub-surface CharacterIstics on the Contrast of Multilayer FiIm Grating Imaging
Zhang Longfei,Wang Xingrui,Deng Xiao,et al. ACTA METROLOGICA SINICA,2018,39(03):299-303
20、Asymmetric line edge roughness of multilayer grating reference materials
Wang Xingrui, Cheng Xinbin, Zhang Longfei, et al. Aip Adv, 2018, 8(3)

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