科学研究

Process optimization of selective wet etching for fabrication of high aspect-ratio and uniform multilayer grating reference materials

Zhang Longfei, Wang Xingrui, Cheng Xinbin, et al. J Micro-Nanolith Mem, 2018, 17(4).

发布时间:2018-12-05 发布者: 来源: 浏览:

Zhang Longfei, Wang Xingrui, Cheng Xinbin, et al. J Micro-Nanolith Mem, 2018, 17(4).