科学研究

Influence of dry etching on the properties of SiO2 and HfO2 single layers

​Xie L , Liu H , Zhao J , et al. Applied Optics, 2020, 59(5).

发布时间:2020-02-02 发布者: 来源: 浏览:

Xie L , Liu H , Zhao J , et al. Applied Optics, 2020, 59(5).