科学研究

Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings

Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-.

发布时间:2021-02-05 发布者: 来源: 浏览:

Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-.