科学研究

A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope

Deng Xiao, Dai Gaoliang, Liu Jie, et al, Ultramicroscopy, 2021,226.

发布时间:2021-05-03 发布者: 来源: 浏览:

Xiao Deng, Gaoliang Dai, Jie Liu, et al, Ultramicroscopy, 2021,226.