科学研究

首页 / 科学研究 / 科研成果 / 论文与专著 / 论著列表 / 正文

科学研究

A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope
Deng Xiao, Dai Gaoliang, Liu Jie, et al, Ultramicroscopy, 2021,226.

发布时间：2021-05-03 发布者：来源：浏览：

Xiao Deng, Gaoliang Dai, Jie Liu, et al, Ultramicroscopy, 2021,226.

下一条：Hf1-xSixO2 Nanocomposite Coatings Prepared by Ion-Assisted Co-Evaporation Process for Low-Loss and High-LIDT Optics