- 11、Hf1-xSixO2 Nanocomposite Coatings Prepared by Ion-Assisted Co-Evaporation Process for Low-Loss and High-LIDT Optics
Jiao H, Niu X, Zhang J, et al. Materials, 2021, 14(10)
- 12、Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings
Liu Jie, Zhao Jun, Deng Xiao, et al, Nanotechnology, 2021, 32(17):175301-
- 13、Damage characteristics of dual-band high reflectors affected by nodule defects in the femtosecond regime
Ma B, Han J, Li J, et al. Chinese optics letters, 2021, 19(8)
- 14、Rectangular multilayer dielectric gratings with broadband high diffraction efficiency and enhanced laser damage resistance
Xie L , J Zhang, Zhang Z , et al. Optics Express, 2021, 29(2)
- 15、Evolution of chemical, structural, and mechanical properties of titanium nitride thin films deposited under different nitrogen partial pressure
Runze Qi, Liuyang Pan, Yufei Feng, Jiali Wu, Wenbin Li, Zhanshan Wang, Results in Physics, 19, 103416 (2020)
- 16、Self-traceable nano-grating frequency doubling based on polarization gradient light field
Wang Xinpan, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 17、Optimization of line edge roughness before and after etching with photoresist in soft x-ray interference lithography
Tang Zhaohui, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 18、Study on diffraction efficiency of Cr nanograting prepared by laser-focused atomic deposition
Liu Jie, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 19、A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography
Gu Zhenjie, Deng Xiao, Cai Yanni, et al. Proc Spie, 2020, 11617
- 20、The effects of thermocompression bonding on Si/ SiO2 multilayer thin-film based critical dimension structures
Cai Yanni, Deng Xiao, Wang Xinpan, et al. Proc Spie, 2020, 11617