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一种超高精度多层膜厚度漂移误差标定方法
Time:2020-09-10
Publisher:
Source:
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专利类型:发明专利
申请
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专利号:
CN202010945043.2
发明
/
设计人:王占山
黄秋实
齐润泽
张众
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抗环境侵蚀极紫外多层膜表面保护层快速制备方法及应用
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基于线型磁控溅射靶枪的大尺寸平面基底镀膜方法及装置
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