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基于线型磁控溅射靶枪的大尺寸平面基底镀膜方法及装置
Time:2020-09-03
Publisher:
Source:
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专利类型:发明专利
申请
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专利号:
CN202010913247.8
发明
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设计人:王占山
齐润泽
王长青
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