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一种提高高反射薄膜激光损伤阈值的镀制方法
Time:2014-01-29
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专利类型:发明授权
申请/专利号: CN201210213070.6
发明/设计人:焦宏飞; 王利; 张艳云; 鲍刚华; 程鑫彬; 王占山
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一个薄膜残余应力分离和测量装置
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