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2021年中国仪器仪表学会技术发明一等奖
Time:2022-10-28
Publisher:
Source:
Visit:
项目名称
:
大尺寸高效率极紫外与
X
射线薄膜器件技术及应用
奖励等级
:
一等奖
获奖者
:
同济大学
Next:
抗环境侵蚀极紫外多层膜表面保护层快速制备方法及应用
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