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一种双功能柱对称大尺寸高均匀性线型磁控靶镀膜设备
Time:2017-09-08
Publisher:
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专利类型:发明专利
申请
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专利号:
CN201710247265.5
发明
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设计人:王占山 黄秋实 齐润泽 张众 慈连鳌
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